Product Name : Wafer Automatic Cleaner with single
Products

Wafer Automatic Cleaner with single tank-profile

  • Put the 6"~12" wafer into wafer cassette, use DI water with ultrasonic to cleaning, then use the N2 for drying, had clean and dry.

Wafer Automatic Cleaner with sing tank-feature

  • Full-automatic clean.
  • Easy operating.
  • Multiple safe protect.

Wafer Automatic Cleaner with sing tank - specification

Model

Wafer size

Machine dimensions

 (Unit:CM)

Power

consumption

(KVA)

YF-68W
YF-812W

6"~8"Wafer
8"~12"Wafer

L170 x W150 x H250
L170 x W150 x H270

60
70

Power

AC 220V / 380V / 415V 3PHASE 50HZ / 60HZ